M. Joshua Lee, Professeur à Hong Kong City University, donnera une conférence sur le sujet :
le jeudi 09 mai 2019 à 15h00 en salle de conférences d'XLIM1, à Limoges - Campus La Borie - Faculté des Sciences et Techniques.
Abstract: Piezoelectric thin film deposition technology has made substantial progress over the last two decades as driven by developments in high-volume manufacturing, particularly CMOS-compatible piezoelectric aluminium nitride (AlN) thin films. This seminar will first highlight some advances towards low impedance and high-quality factor (Q) resonators for frequency control, delivering Qs above 10,000 and impedances below 50 Ohms close to the UHF range. These high-performance resonators have been used to realize low phase noise oscillators. The rest of the talk will illustrate how the advantages of AlN technology might be exploited to realize resonant sensors targeting operation in ambient conditions and dissipative media through three examples: (1) resonant sensing platforms operable in liquids for biosensing applications, (2) MEMS magnetic sensors targeting electronic compass applications for next-generation integrated inertial measurement units and (3) air-coupled range-finders for touchless sensing applications.